Compact Superconducting Microwave Resonators Based on Al-AlOx-Al Capacitors
Julia Zotova, Rui Wang, Alexander Semenov, Yu Zhou, Ivan Khrapach, Akiyoshi Tomonaga, Oleg Astafiev, Jaw-Shen Tsai
DOI 10.1103/PhysRevApplied.19.044067 · Physical Review Applied
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Abstract
We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum-aluminum oxide-aluminum (Al-AlOx-Al) parallel-plate capacitors. The size of the resonators is only 0.04mm2, which is more than one order smaller than the typical size of coplanar resonators (1mm2). The fabrication method we develop easily fits into the standard superconducting qubit fabrication process. We obtain capacitance per area 14fF/μm2 and the internal quality factor 1×103–8×103 at the single-photon level. Our results show that such devices based on Al-AlOx-Al capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as 0−π qubit.
Source-reported materials — not catalogue approval
| Formula | Reported Tc (K) | Pressure (GPa) | Type |
|---|---|---|---|
| Al Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | — | Pressure not reported | unknown |
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