Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

Savio Fabretti; Patrick Thomas; Markus Meinert; Andy Thomas

doi:10.1007/S10948-012-1959-5

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Fabrication of superconducting MgB2 thin films by magnetron co-sputtering on (001) MgO substrates

Savio Fabretti, Patrick Thomas, Markus Meinert, Andy Thomas

arXiv:1008.3325 · DOI 10.1007/S10948-012-1959-5 · 2010-08-19 · Journal of Superconductivity and Novel Magnetism

T1experimental4 citations

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Abstract

We fabricated superconducting MgB2 thin films on (001) MgO substrates. The samples were prepared by magnetron rf and dc co-sputtering on heated substrates. They were annealed ex-situ for one hour at temperatures between 450°C and 750°C. We will show that the substrate temperature during the sputtering process and the post annealing temperatures play a crucial role in forming MgB2 superconducting thin films. We achieved a critical onset temperature of 27.1K for a film thickness of 30nm. The crystal structures were measured by x-ray diffraction.

Source-reported materials — not catalogue approval

Formula	Reported Tc (K)	Pressure (GPa)	Type
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	27.1	Pressure not reported	onset
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	18.9	Pressure not reported	zero_resistance
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	25.8	Pressure not reported	onset
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	24.2	Pressure not reported	zero_resistance
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	27.1	Pressure not reported	onset
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	22	Pressure not reported	zero_resistance
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	25.6	Pressure not reported	onset
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	24	Pressure not reported	zero_resistance
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	29	Pressure not reported	unknown
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	24	Pressure not reported	unknown
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	37	Pressure not reported	unknown
MgB2 Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	39	Pressure not reported	unknown