Etching suspended superconducting hybrid junctions from a multilayer
Hung Q. Nguyen, Laetitia Pascal, Z. H. Peng, Olivier Buisson, B. Gilles, Clemens Winkelmann, Hervé Courtois
arXiv:1111.3541 · DOI 10.1063/1.4729779 · 2011-11-15 · Applied Physics Letters
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Abstract
A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.
Source-reported materials — not catalogue approval
| Formula | Reported Tc (K) | Pressure (GPa) | Type |
|---|---|---|---|
| Al Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 1.15 | Pressure not reported | unknown |
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