Measuring thickness in thin NbN films for superconducting devices

Owen Medeiros; Marco Colangelo; Ilya Charaev; Karl K Berggren

doi:10.1116/1.5088061

← Back to search

Measuring thickness in thin NbN films for superconducting devices

Owen Medeiros, Marco Colangelo, Ilya Charaev, Karl K Berggren

arXiv:1812.05559 · DOI 10.1116/1.5088061 · 2018-12-13 · Journal of Vacuum Science & Technology A

T313 citations

Active bibliographic source — not scientific approval

Bibliographic access preserves source history; it does not approve extracted materials or validate reported claims. Review warnings on each occurrence separately.

Abstract

We present the use of a commercially available fixed-angle multi-wavelength ellipsometer for quickly measuring the thickness of NbN thin films for the fabrication and performance improvement of superconducting nanowire single photon detectors. The process can determine the optical constants of absorbing thin films, removing the need for inaccurate approximations. The tool can be used to observe oxidation growth and allows thickness measurements to be integrated into the characterization of various fabrication processes.