Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber

Maksim V. Shibalov; Ilya M. Asharchuk; Evgeniy O. Epifanov; Igor V. Trofimov; Alexander M. Mumlyakov; Nikita V. Minaev; Yuri V. Anufriev; Michael A. Tarkhov

Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber

Maksim V. Shibalov, Ilya M. Asharchuk, Evgeniy O. Epifanov, Igor V. Trofimov, Alexander M. Mumlyakov, Nikita V. Minaev, Yuri V. Anufriev, Michael A. Tarkhov

arXiv:2402.07592 · 2024-02-12

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Abstract

This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength of 830 nm and a width of 200 nm. This SNSPD is made of a superconducting niobium nitride (NbN) thin film that is produced using plasma-enhanced atomic layer deposition (PEALD). The DBR is made of 15 alternating layers of silicon nitride and silicon oxide that are produced through plasma-enhanced chemical vapor deposition (PECVD). The reflection efficiency of the mirror is 90% at a wavelength of 830 nm. For sufficient optical coupling, an optical micro-connector optimized for multimode or single-mode optical fibers with a diameter of 128 μm was formed using two-photon polymerization techniques. The niobium nitride film was deposited onto the DBR surface in-situ in two separate reactors connected by a vacuum transfer. The in-situ technique of deposition of a superconducting niobium nitride film and a distributed Bragg reflector has allowed achieving a detection efficiency of 90% at a wavelength of 830 nm and a dark count rate of 10 s-1 at a temperature of 2.5 K. Additionally, the detector jitter was 50 ps.