Fabrication of mesoscopic Nb wires using conventional e-beam lithographic techniques
Nam Kim, Klavs Hansen, Jussi Toppari, Tarmo Suppula, Jukka Pekola
arXiv:cond-mat/0101334 · DOI 10.1116/1.1445168 · 2001-01-22 · Journal of Vacuum Science & Technology B
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Abstract
Conventional electron beam lithography has been used to fabricate mesoscopic Nb wires with a superconducting transition temperature above 7.0 K. The typical line width and the thickness were 200 nm and 45 nm respectively. Nb was deposited in an ultra-high vacuum evaporation chamber using electron gun heating. All samples exhibited a normal-superconducting transition. The transition temperature decreased with thickness and line width. To demonstrate the feasibility of two angle evaporation techniques we also fabricated small Nb/(Al-)AlO_x/Nb tunnel junctions.
Source-reported materials — not catalogue approval
| Formula | Reported Tc (K) | Pressure (GPa) | Type |
|---|---|---|---|
| Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 9.1 | Pressure unresolved | midpoint |
| Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 8.9 | Pressure unresolved | midpoint |
| Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 8 | Pressure unresolved | midpoint |
| Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 7.3 | Pressure unresolved | midpoint |
| Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 7 | Pressure unresolved | midpoint |
| Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 9.26 | Pressure unresolved | unknown |
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