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Strongly non-linear superconducting silicon resonators

P. Bonnet, F. Chiodi, D. Flanigan, R. Delagrange, N. Brochu, D. Débarre, H. le Sueur

arXiv:2101.11125 · DOI 10.1103/physrevapplied.17.034057 · 2021-01-26 · Physical Review Applied

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Abstract

Superconducting boron doped silicon is a promising material for integrated silicon quantum devices. In particular, its low electronic density and moderate disorder make it a suitable candidate for the fabrication of large inductances with low losses at microwave frequencies. Here, we study experimentally the electrodynamics of superconducting silicon thin layers patterned in coplanar waveguide resonators, targeting three key properties: kinetic inductance, internal losses, and the variation of these quantities with the read-out power. We report the first observation in a doped semiconductor of microwave resonances with internal quality factors of a few thousand. As expected in the BCS framework, superconducting silicon presents a large sheet kinetic inductance, in the 50-500 pH range comparable to strongly disordered superconductors, whose temperature dependence is well described by Mattis-Bardeen theory. We find, though, an unexpectedly strong non-linearity of the complex surface impedance which cannot be explained either as a non-linearity induced by depairing or as quasiparticle heating.

Source-reported materials — not catalogue approval

FormulaReported Tc (K)Pressure (GPa)Type
Si

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0.7Pressure not reportedunknown
Si

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0.46Pressure unresolvedunknown
TiN

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—Pressure not reportedunknown
NbN

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—Pressure not reportedunknown
NbTi

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—Pressure not reportedunknown
NbSi

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—Pressure not reportedunknown
Al

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—Pressure not reportedunknown

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