Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

D. Kowsari; K. Zheng; J. T. Monroe; N. J. Thobaben; X. Du; P. M. Harrington; E. A. Henriksen; D. S. Wisbey; K. W. Murch

doi:10.1063/5.0066441

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Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

D. Kowsari, K. Zheng, J. T. Monroe, N. J. Thobaben, X. Du, P. M. Harrington, E. A. Henriksen, D. S. Wisbey, K. W. Murch

arXiv:2108.05354 · DOI 10.1063/5.0066441 · 2021-08-11 · Applied Physics Letters

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Abstract

We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a residual resistivity ratio of $4.8$. We fabricate the films into coplanar waveguide resonators to extract the intrinsic loss due to the presence of two-level-system fluctuators using microwave measurements. For a coplanar waveguide resonator gap of $2~μ\rm m$, the films exhibit filling-factor-adjusted two-level-system loss tangents as low as $1.5 \times 10^{-7}$ with single-photon regime internal quality factors in excess of one million after removing native surface oxides of the niobium.

Source-reported materials — not catalogue approval

Formula	Reported Tc (K)	Pressure (GPa)	Type
Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	9.2	Pressure not reported	unknown
Nb Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	7.85	Pressure not reported	unknown