Vacuum-Gap Capacitors for Low-Loss Superconducting Resonant Circuits
Katarina Cicak, Michael S. Allman, Joshua A. Strong, Kevin D. Osborn, Raymond W. Simmonds
arXiv:0810.1976 · DOI 10.1109/TASC.2009.2019665 · 2008-10-10
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Abstract
Low-loss microwave components are used in many superconducting resonant circuits from multiplexed readouts of low-temperature detector arrays to quantum bits. Two-level system defects in amorphous dielectric materials cause excess energy loss. In an effort to improve capacitor components, we have used optical lithography and micromachining techniques to develop superconducting parallel-plate capacitors in which lossy dielectrics are replaced by vacuum gaps. Resonance measurements at 50 mK on lumped LC circuits that incorporate these vacuum-gap capacitors (VGCs) reveal loss tangents at low powers as low as 4x10^{-5}, significantly lower than with capacitors using amorphous dielectrics. VGCs are structurally robust, small, and easily scaled to capacitance values above 100 pF.
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