Superconducting micro-resonator arrays with ideal frequency spacing and extremely low frequency collision rate
X. Liu, W. Guo, Y. Wang, M. Dai, L. F. Wei, B. Dober, C. McKenney, G. C. Hilton, J. Hubmayr, J. E. Austermann, J. N. Ullom, J. Gao, M. R. Vissers
arXiv:1711.07914 · DOI 10.1063/1.5016190 · 2017-11-21 · Applied physics letters
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Abstract
We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode (LED) mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this technique on a 127-resonator array made of titanium-nitride (TiN) and show that the uniformity of frequency spacing is greatly improved. The array yield in terms of frequency collisions improves from 84% to 97%, while the quality factors and noise properties are unaffected. The wafer trimming technique provides an easy-to-implement tool to improve the yield and multiplexing density of large resonator arrays, which is important for various applications in photon detection and quantum computing.
Source-reported materials — not catalogue approval
| Formula | Reported Tc (K) | Pressure (GPa) | Type |
|---|---|---|---|
| TiN Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula. | 1.6 | Pressure not reported | unknown |
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