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Fabrication of Nb and MoGe SQUID-on-tip probes by magnetron sputtering

G. Romagnoli, E. Marchiori, K. Bagani, M. Poggio

arXiv:2303.06989 · DOI 10.1063/5.0150222 · 2023-03-13 · Applied Physics Letters

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Abstract

We demonstrate the fabrication of scanning superconducting quantum interference devices (SQUIDs) on the apex of sharp quartz scanning probes -- known as SQUID-on-tip probes -- using conventional magnetron sputtering. We produce and characterize SQUID-on-tips made of both Nb and MoGe with effective diameters ranging from 50 to 80 nm, magnetic flux noise down to \SI{300}{\nanoΦ_{0}/\sqrt{\hertz}}, and operating fields as high as \SI{2.5}{\tesla}. Compared to the SQUID-on-tip fabrication techniques used until now, including thermal evaporation and collimated sputtering, this simplified method facilitates experimentation with different materials, potentially expanding the functionality and operating conditions of these sensitive nanometer-scale scanning probes.

Source-reported materials — not catalogue approval

FormulaReported Tc (K)Pressure (GPa)Type
Nb

Archive — visibility unverified

Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.

—Pressure not reportedunknown
Mo0.79Ge0.21

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Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.

—Pressure not reportedunknown

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