Titanium Nitride Films for Ultrasensitive Microresonator Detectors

Henry G. Leduc; Bruce Bumble; Peter K. Day; Anthony D. Turner; Byeong Ho Eom; Sunil Golwala; David C. Moore; Omid Noroozian; Jonas Zmuidzinas; Jiansong Gao; Benjamin A. Mazin; Sean McHugh; Andrew Merrill

doi:10.1063/1.3480420

Titanium Nitride Films for Ultrasensitive Microresonator Detectors

Henry G. Leduc, Bruce Bumble, Peter K. Day, Anthony D. Turner, Byeong Ho Eom, Sunil Golwala, David C. Moore, Omid Noroozian, Jonas Zmuidzinas, Jiansong Gao, Benjamin A. Mazin, Sean McHugh, Andrew Merrill

arXiv:1003.5584 · DOI 10.1063/1.3480420 · 2010-03-29 · Applied Physics Letters

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Abstract

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, ρ_n ~ 100 $μ$Ohm cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Q_i > 10^7) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10-200 $μ$s. TiN microresonators should therefore reach sensitivities well below 10^-19 WHz^(-1/2).

Source-reported materials — not catalogue approval

Formula	Reported Tc (K)	Pressure (GPa)	Type
NbTiN Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	15	Pressure not reported	unknown
TiN Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	4.1	Pressure not reported	unknown
TiN Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	0.85	Pressure not reported	unknown
TiN Archive — visibility unverified Source-occurrence policy only; no material identity or catalogue acceptance is inferred from the formula.	1.1	Pressure not reported	unknown